| 摘要 |
PROBLEM TO BE SOLVED: To provide a combined cryopump implementing safe regeneration even if mixture of combustible gas and combustion supporting gas is exhausted, and to provide the usage and regeneration method. SOLUTION: In a pump case 3 of cryopumps, which has an exhaust port 2, stages 6 and 7 of a first cryopump 4 are provided upstream, that is, near the exhaust port 2, and exhaust faces 8 communicated to the stages 6 and 7 are provided. Further, through a gate valve 9, stages 10 and 11 of a second cryopump 5 are provided downstream, that is, distance from the exhaust port 2, and exhaust faces 12 communicated to the stages 10 and 11 are provided. The exhaust faces 8 of the first cryopump 4 are arranged so that a person cannot look into an opening downstream of the first cryopump 4 from the exhaust port 2. By the exhaust faces 8 of the first cryopump 4, combustion supporting gas from the exhaust port 2 is condensed and exhausted, and by the exhaust faces 12 of the second cryopump 5, combustible gas from the exhaust port 2 is condensed and exhausted.
|
