发明名称 NEGATIVE PHOTORESIST COMPOSITIONS AND USE THEREOF
摘要 A negative-working photoresist composition comprising 1,4-dihydropyridine derivative as a photosensitive material and a polyamic acid, a heat-resisting photoresist composition comprising a photosensitive polyamic acid which is excellent in sensitivity and resolution and can be easily developed with an aqueous alkali solution is provided. The negative-working photoresist composition contains a polyamic acid and a 1,4-dihydropyridine derivative represented by following formula (I): <CHEM> wherein Ar represents an aromatic group having a nitro group at the ortho-position; R<1> represents an alkylene group having from 1 to 5 carbon atoms; and R<2>, R<3>, R<4>, and R<5> each represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms.
申请公布号 EP0917001(A4) 申请公布日期 2000.07.05
申请号 EP19970933042 申请日期 1997.07.28
申请人 NITTO DENKO CORPORATION 发明人 FUJII, HIROFUMI;HAYASHI, SHUNICHI
分类号 G03F7/004;G03F7/038;H01L21/027 主分类号 G03F7/004
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