发明名称 High actuator density deformable mirror
摘要 An assembly comprises a plurality of thin plate-like members (2,2) arranged in a side-by-side manner. An array (6) of piezoelectric actuators (10,10) is disposed along a portion (5) of each of said actuators. A plurality of leads (34,34) are disposed along each of said plate-like members and each is connected to a respective one of said piezoelectric actuators.
申请公布号 US6084332(A) 申请公布日期 2000.07.04
申请号 US19970992022 申请日期 1997.12.17
申请人 RAYTHEON COMPANY 发明人 LAFIANDRA, CARLO
分类号 G02B26/08;(IPC1-7):H01L41/08 主分类号 G02B26/08
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