FABRICATION METHOD FOR REDUCED-DIMENSION INTEGRATED CIRCUITS,申请号EP19980909985-传众专利搜索

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发明名称	FABRICATION METHOD FOR REDUCED-DIMENSION INTEGRATED CIRCUITS
摘要
申请公布号	EP1012879(A2)	申请公布日期	2000.06.28
申请号	EP19980909985	申请日期	1998.01.29
申请人	ULTRATECH STEPPER INC.	发明人	TALWAR, SOMIT;KRAMER, KARL-JOSEF;VERMA, GUARAV;WEINER, KURT
分类号	H01L29/78;H01L21/225;H01L21/265;H01L21/336;H01L21/8238;H01L27/092;H01L29/08;(IPC1-7):H01L21/823	主分类号	H01L29/78
代理机构		代理人
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