| 摘要 |
PROBLEM TO BE SOLVED: To suspend a table while abrupt suspension is being avoided when a control means is out of operation. SOLUTION: In this positioning device equipped with a xy table capable of being moved in the xy directions over a level plate 1 while a positioning subject item is being held therein, a drive control means 11 drivingly controlling the xy table, static pressure bearings 8 letting the xy table float up with respect to the level plate 1 for supporting the table, and with an air pressure control means 12 controlling air to be fed to the static pressure bearings 8, the pressure control means 12 suspends the air supply to the static pressure bearings when the control means is suspended in a state that the xy table is in a specified condition. |
