| 发明名称 |
PLANETARY SYSTEM WORKPIECE SUPPORT AND METHOD FOR SURFACE TREATMENT OF WORKPIECES |
| 摘要 |
Workpiece supports are driven and displaced around a sun system axis (7), a planetary axis (11) and a moon axis (19) in a vacuum processing plant that is provided with planetary system workpiece supports. The drive link via the sun system, planetary system and moon system is interrupted during operation. |
| 申请公布号 |
WO0036178(A1) |
申请公布日期 |
2000.06.22 |
| 申请号 |
WO1999CH00602 |
申请日期 |
1999.12.15 |
| 申请人 |
BALZERS AKTIENGESELLSCHAFT;ZAECH, MARTIN;KUNZ, ANTON |
发明人 |
ZAECH, MARTIN;KUNZ, ANTON |
| 分类号 |
C23C14/50;C23C16/44 |
主分类号 |
C23C14/50 |
| 代理机构 |
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代理人 |
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| 地址 |
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