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发明名称
Ablösevorrichtung für Mikrobauteile
摘要
申请公布号
DE19752582(C2)
申请公布日期
2000.06.21
申请号
DE19971052582
申请日期
1997.11.27
申请人
INSTITUT FUER MIKROTECHNIK MAINZ GMBH
发明人
NIENHAUS, MATTHIAS;THUERIGEN, CHRISTIAN;GRAEFF, VOLKER
分类号
H05K13/04;(IPC1-7):H05K13/02;B65G47/91;H01L21/68;B81C3/00
主分类号
H05K13/04
代理机构
代理人
主权项
地址
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