| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ink jet head in which the size of a substrate is reduced, the mounting process is simplified and reduced in cost, density of electrodes facing a diaphragm is increased, and the process is simplified. SOLUTION: This ink jet head comprises a nozzle 330, an ink channel 130 communicating with the nozzle 330, a diaphragm 120 disposed at a part of the channel 130, and individual electrodes 220 disposed oppositely to the diaphragm 120 on the opposite sides of a gap 150. A drive voltage is applied between a common electrode fixed to the diaphragm 120 and the individual electrodes 220 to deform the diaphragm 120 electrostatically thus ejecting an ink liquid drop from the nozzle 330. An insulating film 260 for forming a gap is provided between a part of the face of the individual electrode 220 facing the diaphragm 120 and a part of the diaphragm 120 or a substrate on which the diaphragm 120 is formed. A pad metal 250 for taking out the potential to the outside is formed on the surface of the individual electrode 220 opposite to the diaphragm 120 and adjacent individual electrodes are separated by means of an insulator 280 or vacuum.
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