发明名称 Dimpled contacts for metal-to-semiconductor connections, and methods for fabricating same
摘要 An improved electrical connection between a metal surface and a semiconductor surface is provided by the deposition of a conductive dimple on the metal surface, whereby the conductive dimple is interposed between the metal surface and the semiconductor substrate. For example, a conductive trace deposited on an insulating substrate may have a conductive dimple formed thereon. A semiconductor substrate, such as a silicon substrate, may be bonded to the insulating substrate over at least a portion of the metal trace having the dimple thereon to form an electrical connection between the semiconductor substrate and the conductive trace.
申请公布号 US6078103(A) 申请公布日期 2000.06.20
申请号 US19980182387 申请日期 1998.10.29
申请人 MCDONNELL DOUGLAS CORPORATION 发明人 TURNER, GARY B.
分类号 G01L9/04;B81B7/00;B81C99/00;H01L21/58;H01L23/48;H01L23/498;(IPC1-7):H01L23/48 主分类号 G01L9/04
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