| 摘要 |
PROBLEM TO BE SOLVED: To obtain a film thickness observing device for a film-forming apparatus which can accurately observe the thickness of a transparent film formed on a transparent film, even if projection light which is emitted by a light source and made incident on the transparent film on the transparent film varies in quantity. SOLUTION: This film thickness observing device for a film-forming apparatus which forms the transparent film on the transparent film 3 on a mirror surface has the light source 6, a sensor 5 which makes the projection light emitted by the light source 6 incident on the transparent film and guides out reflected light from the mirror surface 2 which is projected from the transparent film, a 1st optical detector 9 which receives the reflected light guided out of the sensor 5 and obtains an optical detection signal, and a 2nd optical detector 10 which receives the projection light emitted by the light source 6 and obtains an optical detection signal, and observes the thickness of the transparent film from the level of the optical detection signal from the 1st optical detector.
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