SURFACE INSPECTING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection device saved in space of the whole device and reduced in the cost. SOLUTION: This device is provided with first light emitting systems 11A-15A for emitting first optical beams to a surface to be inspected 21 and collectively forming a first strip irradiation area 51A along a prescribed first direction (X-axial direction) on the surface to be inspected 21; a first light receiving system 18A for receiving the scattered light from the first strip irradiation area 51A; a second light emitting system for emitting a second optical beam to the surface to be inspected 21 and collectively forming a second strip irradiation area 51B along the first direction (X-axial direction); a second light receiving system 18B for receiving the scattered light from the second strip irradiation area 51B; and a scanning means 71 for relatively moving the first and second light emitting systems and the surface to be inspected 21 along the second direction (Y-axial direction) substantially orthogonal to the first direction (X- axial direction). The first strip irradiation area 51A and the second strip irradiation area 51B are formed on the surface to be inspected 21 with a slippage of a prescribed distance along the second direction (Y-axial direction).