METHOD FOR PRODUCING A CONCAVE CAPACITOR INCLUDING A JOINT SPACER

摘要

PURPOSE: A method for producing a concave capacitor including a joint spacer is provided to prevent lifting of a storage electrode from an insulator between layers. CONSTITUTION: A method for producing a concave capacitor including a joint spacer includes first through forth steps. At the first step, an insulator between layers(70) is formed on a semiconductor board. At the second step, a concave pattern(38a) with a storage node hole(38h) exposing a part of the semiconductor board is formed by patterning the insulator between layers. At the third step, a joint spacer(50a) is formed on a side wall of the concave pattern exposed by the storage node hole. At the forth step, a lower electrode(60a) in the storage node hole enclosing a upper surface of the semiconductor board and the joint spacer.