发明名称 |
FABRICATION METHOD OF THIN FILM ACTUATED MIRROR ARRAY |
摘要 |
PURPOSE: A fabrication method of thin film actuated mirror array is provided to remove the stress generated while forming a mirror by using a stress control layer, thereby enhancing the horizontality of the mirror. CONSTITUTION: A fabrication method of thin film actuated mirror array comprises steps of: forming a first sacrifice layer(160) and an actuator(210) on an active matrix(100); forming support elements(175) between the active matrix and the actuator; forming a second sacrifice layer(300) and photoresist on the actuator and the support elements; forming a hard mask(330) on the photoresist and then patterning the photoresist and the second sacrifice layer using the hard mask, thereby forming a post hole; removing the hard mask; forming a stress control layer(340) on the photoresist and the post hole; and forming a mirror(260) on the stress control layer.
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申请公布号 |
KR20000032305(A) |
申请公布日期 |
2000.06.15 |
申请号 |
KR19980048727 |
申请日期 |
1998.11.13 |
申请人 |
DAEWOO ELECTRONICS CO., LTD. |
发明人 |
KIM, HWA NYEON |
分类号 |
G02F1/015;(IPC1-7):G02F1/015 |
主分类号 |
G02F1/015 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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