| 摘要 |
PURPOSE: A fabrication method of thin film actuated mirror array is provided to protect an actuator formed on a front surface of an actuator in etching process for patterning a rear surface of an active matrix. CONSTITUTION: A fabrication method of thin film actuated mirror array comprises steps of: forming an actuator(210) on an active matrix(100); forming support elements(175) between the active matrix and the actuator; patterning the rear surface of the active matrix; and forming a mirror(260). The actuator and the support elements are formed by forming a first layer, a lower electrode layer, a second layer and an upper electrode layer on the active matrix and then sequentially patterning them. The actuator comprises first/second upper electrodes, first/second deformation layers and a lower electrode. The support elements comprise a support layer, support lines and first/second anchors.
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