发明名称 Method of making straight wall containers and the resultant containers
摘要 A method for providing semiconductor openings having a substantially straight wall or other desired etch profile. An etchable material layer is formed having target dopant levels or other etch rate varying characteristics to compensate for the characteristics of a selected etching process to achieve the desired etch profile. The etching process may also be varied to further match the characteristics of the etchable material layer.
申请公布号 AU1465800(A) 申请公布日期 2000.06.13
申请号 AU20000014658 申请日期 1999.11.05
申请人 MICRON TECHNOLOGY, INC. 发明人 GURTEJ S. SANDHU;CEREDIG ROBERTS
分类号 H01L21/02;H01L21/311;H01L21/316;H01L21/8242 主分类号 H01L21/02
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