| 摘要 |
The height of the surface of an object (101) is measured on the principle of triangulation using a laser beam emitted from a laser diode (105), dark- and bright-field images of the object (101) are produced by a line sensor camera (138) by means of a ringlike illuminator (131) and a light source (137), and illuminance image information about both the images is inputted into a controller (121), thereby conducting position measurement or defect inspection of the object (101) with high accuracy. The burden on the operator is lightened.
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