Ceramic member with an electrode and a plurality of tapered through holes for controlling the ejection of particles by switching the sign of a charge on the electrode

摘要

A ceramic member has a flat or curved ceramic plate having a plurality of minute through holes of a maximum pore diameter of 150 mu m or less, and having electrodes installed on one surface of the plate. The ceramic member controls the ejection of ions carrying either positive or negative charge from the minute through holes by switching the sign of charge carried by the electrodes. The minute through holes are tapered toward the side where ions are ejected. The ceramic member gives an improved property of ejecting charged particle from minute through holes while maintaining high mechanical strength and productivity.