发明名称 |
Micromachined rotating integrated switch |
摘要 |
A microelectromechanical system (MEMS) switch has a bidirectionally rotating member having two positions for integrated circuit connection. The switch is formed on a circular standoff bearing for rotating the switch in the plane of the substrate using conventional processing techniques. Control traces carry electrical signals generating electrical fields to provide an electro-static force upon the rotating switch member to rotate the switch clockwise or counter-clockwise to position and maintain it in either of two positions. The MEMS switch has wide applications to a variety of microelectromechanical system circuit applications.
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申请公布号 |
US6072686(A) |
申请公布日期 |
2000.06.06 |
申请号 |
US19980210515 |
申请日期 |
1998.12.11 |
申请人 |
THE AEROSPACE CORPORATION |
发明人 |
YARBROUGH, ALLYSON D. |
分类号 |
H01H59/00;H01P1/12;(IPC1-7):H01P1/10 |
主分类号 |
H01H59/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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