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发明名称
Imaged aperture mask grating writing
摘要
申请公布号
AU1534700(A)
申请公布日期
2000.06.05
申请号
AU20000015347
申请日期
1999.11.12
申请人
THE UNIVERSITY OF SYDNEY
发明人
JOHN CANNING
分类号
G02B5/26;G02B5/28;G02B6/10
主分类号
G02B5/26
代理机构
代理人
主权项
地址
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