| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an element having a high electron emission efficiency, by equipping a container for housing a substrate having a pair of electrodes and a conductive film arranged between the pair of the electrodes, an evacuation device, a gas introduction line, a water removal device installed on the way of the introduction line, and a power source for applying a voltage between the pair of the electrodes. SOLUTION: An image display device is connected to a vacuum chamber 32 through an exhaust pipe 31, and furthermore connected to an exhaust device 34 through a gate valve 33. A pressure gage 35, a quadruple mass spectrometer 36 or the like are installed in the vacuum chamber 32 in order to measure an internal pressure and partial pressures of each component in the atmosphere. Direct measurement of the pressure inside an envelope 88 of the image display device or the like is difficult, therefore, the pressure in the vacuum chamber 32 or the like is measured, to thereby control processing conditions. A gas introduction line is also connected to the vacuum chamber 32, and filters 42 for adsorbing water selectively from the gas are installed on the way.</p> |
