发明名称 |
Substrate transfer system for semiconductor processing equipment |
摘要 |
A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either the inner or the outer susceptor sections. When the inner section is engaged, the support spider lifts the inner section vertically out of the outer section. When the outer section is engaged, the support spider raises and lowers the entire susceptor unit. A fork type robotic arm end effector permits wafer pick up and unloading by the inner susceptor section.
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申请公布号 |
US6068441(A) |
申请公布日期 |
2000.05.30 |
申请号 |
US19970976537 |
申请日期 |
1997.11.21 |
申请人 |
ASM AMERICA, INC. |
发明人 |
RAAIJMAKERS, IVO;JACOBS, LOREN;HALPIN, MIKE;ALEXANDER, JIM;O'NEILL, KEN;GOODWIN, DENNIS LEE |
分类号 |
B65G49/07;H01L21/687;(IPC1-7):B65G49/07;H01L21/68 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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