发明名称 PIPELINE FOR PASSING GAS-DISSOLVED CLEANING WATER
摘要 PROBLEM TO BE SOLVED: To supply cleaning water containing a dissolved gas at a roughly fixed gas concentration to all using points even when the cleaning water is transferred for a long distance, by providing an in-line mixer in the proximity of a branching section at which a branch pipeline is branched off a main pipeline on the upstream side of the section. SOLUTION: A mixed gas of ozone and oxygen gas is produced by sending a mixed gas of oxygen gas and a small amount of nitrogen gas to an ozone generator 3 from an oxygen gas container 1 and a nitrogen gas container 2, and an ozone dissolving device 4 sends the produced mixed gas to pure water produced by using ion exchange equipment, a membrane device, an ultraviolet oxidizing device, etc., by means of a pump, etc. Then the device 4 produces ozone-dissolving cleaning water by mixing the mixed gas of ozone and oxygen in the pure water in a gas-liquid mixed state and, in addition, makes the cleaning water to flow through a main pipeline 5. In this case, an in-line mixer 12 is provided in the proximity of the branching section 11 at which a branch pipeline 10 is branched off the main pipeline 5 on the upstream side of the section 11.
申请公布号 JP2000150450(A) 申请公布日期 2000.05.30
申请号 JP19980325627 申请日期 1998.11.16
申请人 KURITA WATER IND LTD 发明人 MORITA HIROSHI
分类号 H01L21/304;B01F3/04;C02F1/72;F17D1/00;F17D1/08 主分类号 H01L21/304
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