| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric accelerometer in which the number of components is small, which is manufactured easily and in which a change in temperature and humidity is small and to provide its manufacturing method. SOLUTION: A diaphragm which is formed to be disklike is provided. In addition, a cylindrical plumb hob is provided in the central part on one face of the diaphragm. In addition, a fixation base is provided in the outer circumferential part. A sensor part is constituted of a piezoelectric ceramic body in which a plated film 8 having a prescribed thickness is executed to one face of the plumb hob at the diaphragm and in which a three-axis pattern electrode 5 is executed to the other face. The sensor part and a holder 10 are fixed and bonded. One end part of the pattern electrode 5 is connected to a circuit board 11 via a connecting terminal 12. A metal case 13 is assembled. |
