发明名称 MANAGEMENT SYSTEM OF PRODUCTIVE EQUIPMENT HAVING FUNCTION TO DETECT CHANGE IN INPUT PARAMETER
摘要 PURPOSE: A management system of productive equipment is provided to detect the abnormality of equipment by sensing the change in an input parameter as well as constructing the input parameter of the productive equipment as database. CONSTITUTION: If an equipment(16) is abnormal or to continue a process, a production automation unit(10) decides the abnormality of equipment from the database of an input parameter. Therefore, the productive equipment is interlocked by generating a hold signal. The productive equipment is used as a block for performing the actual process according the initial set input parameter, accumulating the actual value of the input parameter on data base(19), and outputting the process data to the production automation unit. A production management unit(12) accumulates the process data outputted from the production automation unit on data base(14) while using the accumulated process consequence. The data base(19) accumulates the changed actual value of the input parameter after performing the process by the input parameter. An extraction unit(18) of a changed curve extracts changed curve function by converting the actual value of the input parameter into the mathematical function.
申请公布号 KR20000028114(A) 申请公布日期 2000.05.25
申请号 KR19980046251 申请日期 1998.10.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, DAE U
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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