发明名称 |
Aqueous solution for cleaning a semiconductor substrate |
摘要 |
Aqueous solutions for cleaning semiconductor substrates are formed primarily of a base, hydrogen peroxide and a complexing agent. The complexing agent is a heterocyclic hydrocarbon having a ring size of at least 9 and at most 18 atoms and at least 3 heteroatoms, for example nitrogen, oxygen or sulfur. In the case of nitrogen-containing cryptands, these may additionally be formed with functional reactive groups and/or aliphatic bridges between the nitrogen atoms (cage structures).
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申请公布号 |
US6066609(A) |
申请公布日期 |
2000.05.23 |
申请号 |
US19990243298 |
申请日期 |
1999.02.02 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
MARTIN, ANDREAS;HUB, WALTER;KOLBESEN, BERND |
分类号 |
C11D3/39;C11D7/26;C11D7/34;C11D11/00;H01L21/306;(IPC1-7):H01L21/306;C11D7/50 |
主分类号 |
C11D3/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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