发明名称 PHOTOSENSITIVE COMPOUNDS, PHOTOSENSITIVE RESIN COMPOSITIONS, AND PATTERN FORMATION METHOD MAKING USE OF THE COMPOUNDS OR COMPOSITIONS
摘要 The photosensitive compound of the present invention contains the unit (I) and is particularly expressed by the following formula (III). Different photosensitive resin compositions can be prepared from this novel photosensitive resin compound, and the thus-obtained photosensitive resin compositions do not raise the problem of environmental pollution, are endowed with high resolution, possess a high level of sensitivity, and exhibit excellent adhesion with substrates, coating characteristics, and storage stability.
申请公布号 WO0028382(A1) 申请公布日期 2000.05.18
申请号 WO1998JP05028 申请日期 1998.11.09
申请人 TOYO GOSEI KOGYO CO., LTD. 发明人 SHIBUYA, TORU;XIE, JIAN, RONG;TOCHIZAWA, NORIAKI
分类号 C07D277/20;C08F8/34;G03F7/00;G03F7/004;G03F7/008;G03F7/012 主分类号 C07D277/20
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