发明名称 |
PHOTOSENSITIVE COMPOUNDS, PHOTOSENSITIVE RESIN COMPOSITIONS, AND PATTERN FORMATION METHOD MAKING USE OF THE COMPOUNDS OR COMPOSITIONS |
摘要 |
The photosensitive compound of the present invention contains the unit (I) and is particularly expressed by the following formula (III). Different photosensitive resin compositions can be prepared from this novel photosensitive resin compound, and the thus-obtained photosensitive resin compositions do not raise the problem of environmental pollution, are endowed with high resolution, possess a high level of sensitivity, and exhibit excellent adhesion with substrates, coating characteristics, and storage stability. |
申请公布号 |
WO0028382(A1) |
申请公布日期 |
2000.05.18 |
申请号 |
WO1998JP05028 |
申请日期 |
1998.11.09 |
申请人 |
TOYO GOSEI KOGYO CO., LTD. |
发明人 |
SHIBUYA, TORU;XIE, JIAN, RONG;TOCHIZAWA, NORIAKI |
分类号 |
C07D277/20;C08F8/34;G03F7/00;G03F7/004;G03F7/008;G03F7/012 |
主分类号 |
C07D277/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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