Scanning apparatus for semiconductor disks

摘要

The apparatus includes a base plate with a movable deposition plate for accommodating the semiconductor disk (9). A liquid drop is positioned on the surface of the semiconductor disk and the disk and the drop are moved. Preferably, the semiconductor disk is provided horizontally on the deposition plate. The drop is positioned in a scan tube, which is positioned directly over the surface of the semiconductor disk. The scan tube consists of a plastics material with hydrophobic characteristics.