THIN FILM MAGNETIC SENSOR

摘要

PROBLEM TO BE SOLVED: To obtain a high-sensitivity magnetic sensor the characteristics of which are less degraded by a protective layer. SOLUTION: In a magnetic sensor, a semiconductor intermediate layer 13 is formed between an InxGa1-xAsySb1-y (0<x<=1 and 0<=y<=1) thin film 2 and a protective film 11 composed of an inorganic insulating layer. The layer 13 has an AlxIn1-xSb (0<x<=1) or GaAsxSb1-x (0<=x<=1) composition having a large band gap and electron mobility which is smaller than that of the InxGa1-xAsySb1-y thin film 2.