| 摘要 |
PURPOSE: An ion source part in ion implanter is provided to perform a stable repair of oily water inside of the ion source part. CONSTITUTION: An ion source part in ion implanter comprises a case (10) grounded to the ion source part (100) and having devices for ionizing the source gas inside thereof, a plurality of doors (12) installed in the case (10), a micro-switch (32) installed in each of the doors (12) in parallel and operating when at least one of the doors (12) are opened, a relay (40) having an input terminal connected to the micro-switch (32) in parallel, and a luminator (24) installed at the ceiling of the case (10). At least one of the doors are opened for operating the relay (40) by switching off the micro-switch (32). Inside of the case becomes illuminant by operating the luminator (24) with the power supplied from the relay (40).
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