ELECTROSTATIC CHUCK

摘要

An electrostatic chuck for attracting an object to be treated, includes a substrate(1), an insulating dielectric layer (4) and at least one electrode (9) provided between the substrate and the insulating dielectric layer, wherein the above object is to be attracted onto the electrode via the insulating dielectric layer and an average thickness of the insulating dielectric layer (4) is not less than 0.5 mm and not more than 5.0 mm.