WAFER CONVEYING SYSTEM USED FOR SEMICONDUCTOR MANUFACTURING PROCESS

摘要

PURPOSE: A wafer conveying system used for a semiconductor manufacturing process is provided to prevent a wafer from being dropped out of a conveying path by alarming an abnormal wafer conveying state. CONSTITUTION: A wafer conveying system used for a semiconductor manufacturing process includes a sensor(141) for sensing an abnormal conveying state of a wafer and an alarming device(390) for alarming the abnormal conveying state of the wafer in accordance with electric signals transmitted from the sensor. The sensor(141) is installed on a wafer conveying path defined by an unload conveyer for conveying the wafer to a predetermined location, an unload stage where the conveyed wafers are stacked, and a shuttle(120) for stacking the wafers on the unload stage.