METHOD FOR PRODUCING INK-JETTING DEVICE

摘要

PURPOSE: A method for producing an ink-jetting device is provided to complete the ink-jetting device in a wafer unit by forming a nozzle unit with a spinning process. CONSTITUTION: A driving unit is formed by sequentially forming an electrode, a generator, and a barrier layer of fluid(114) on a first silicon wafer(111), and forming a driving fluid chamber(115) in the barrier layer of fluid(114). A member lane is formed by separating a second silicon wafer(123) after coating a polyimide and an adhesive polyimide on the second silicon wafer, and sticking a first reinforcing ring in the upper face of the coated layer of adhesive polyimide. A nozzle unit is formed by forming a nozzle(134) in a nozzle plate(132) after forming a nozzle plate and a barrier layer of ink on the upper face of a third silicon wafer stuck a second reinforcing ring through a spinning process, and forming an ink chamber(133) in the barrier layer of ink. a polyimide coated layer(121) of the member lane is stuck on the upper face of the ink barrier layer(131) of the nozzle unit, and the first reinforcing ring and the third silicon wafer are separated. The ink-jetting device is produced by sticking the adhesive polyimide coated layer of the member lane in the fluid barrier layer of the driving unit.