发明名称 Transport of gases pumped in a vacuum pump or in pipings
摘要 Vacuum generation apparatus comprises at least one vacuum pump associated to a suction line and a backflow line (1); at least a portion of the apparatus is separated from the exterior atmosphere (6) by a volume (7) having an appropriate vacuum.
申请公布号 EP0999292(A1) 申请公布日期 2000.05.10
申请号 EP19990402603 申请日期 1999.10.21
申请人 ALCATEL 发明人 HOUZE, FRANCOIS
分类号 B01J3/02;C23C16/44;F04B37/16;F16L55/033 主分类号 B01J3/02
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