发明名称 |
Transport of gases pumped in a vacuum pump or in pipings |
摘要 |
Vacuum generation apparatus comprises at least one vacuum pump associated to a suction line and a backflow line (1); at least a portion of the apparatus is separated from the exterior atmosphere (6) by a volume (7) having an appropriate vacuum. |
申请公布号 |
EP0999292(A1) |
申请公布日期 |
2000.05.10 |
申请号 |
EP19990402603 |
申请日期 |
1999.10.21 |
申请人 |
ALCATEL |
发明人 |
HOUZE, FRANCOIS |
分类号 |
B01J3/02;C23C16/44;F04B37/16;F16L55/033 |
主分类号 |
B01J3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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