发明名称 |
Process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope |
摘要 |
A process for fabricating a feeler member for a micromechanical probe, in particular for an atomic force microscope, consists in creating a "positive" first mold by isotropically or anisotropically undercutting a silicon substrate. The resulting tip is precursor of the hard material (preferably diamond) tip to be obtained. The precursor has a small angle at the apex, for example in the order of 10 DEG to 20 DEG , or less. The positive mold is then used to fabricate a "negative" mold having an imprint whose shape is that of the tip precursor. The negative mold is filled with a layer of hard material and the tip is then uncovered. The hard material tip therefore also has a small angle at the apex, equal to that of the precursor. The resolution that can be achieved with the probe is therefore higher than that assured by prior art probes.
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申请公布号 |
US6056887(A) |
申请公布日期 |
2000.05.02 |
申请号 |
US19980090791 |
申请日期 |
1998.06.04 |
申请人 |
C.S.E.M. - CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUES S.A. |
发明人 |
NIEDERMANN, PHILIPP;BEURET, CYNTHIA;JEANNERET, SYLVAIN |
分类号 |
B23P5/00;B44C1/22;B81B1/00;C23F1/00;C25F3/00;G01B7/34;G01B21/20;G01N27/00;H01L49/00;(IPC1-7):C23F1/00 |
主分类号 |
B23P5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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