| 摘要 |
PROBLEM TO BE SOLVED: To automatically inspect spot defects speedily and accurately by obtaining evaluation values according to label area between adjacent labels for the labels corresponding to indication pixels or concentration sum and distance. SOLUTION: Light is irradiated from a light source 2 to a shadow mask 1. An image of an inspecting body 1 is taken in from a TV camera 3. Label area of labeling the indication pixel part of the taken concentration data or concentration sum is obtained to make it a label evaluation value, and labels having the evaluation value in ranges to be candidate of spot defects are extracted. Then distance between labels are obtained, labels having the distance below a certain value are detected, combined evaluation values calculated from the label areas and the distances are obtained for all labels below a certain distance and the sum of the combined evaluation values is made a coagulated evaluation value to extract the coagulation evaluation value. Next, the obtained coagulation evaluation values is judged whether 'spot defects' or not based on the standard set in advance. |
