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发明名称
Low temperature etching in cold-wall CVD systems
摘要
申请公布号
EP0638923(B1)
申请公布日期
2000.04.26
申请号
EP19940304940
申请日期
1994.07.05
申请人
APPLIED MATERIALS, INC.
发明人
CARLSON, DAVID;HEY, H. PETER W.;HANN, JAMES C.
分类号
H01L21/205;C23C16/44;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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