PRODUCTION OF HIGH PURITY RUTHENIUM FINE POWDER

摘要

PROBLEM TO BE SOLVED: To provide a producing method of high purity Ru fine powder having fine particle diameter. SOLUTION: The producing method of the high purity Ru fine powder is for preparing a press molding by pressing Ru powder on the market, preparing an electron beam molten material by melting the press molding with an electron beam and after working and hardening the electron beam molten material at need, grinding it with a grindstone, separating and removing abrasive grains from the ground powder of Ru obtained by grinding and further, chemically cleaning.