| 摘要 |
PROBLEM TO BE SOLVED: To greatly improve the productivity and enable the more low-voltage drive by pasting one surface of a piezoelectric sheet onto a vibration board through a first conductor layer, cutting the other surface of the sheet, facing it at a pressure chamber of a passage board, and forming a second conductor layer of a specified pattern on the other surface of the sheet. SOLUTION: A first conductor layer 51 is formed on one surface of a piezoelectric green sheet 50, it is sintered and polarized in the thickness direction, one surface of the sheet 50 is pasted one surface of a vibration board 44, the other surface of the sheet 50 is cut on the whole to about 10 μm or more thick, a second conductor layer 52 is laminated on the other surface of the sheet 50 to form a multilayer board 53 composed of the vibration board 44, the first conductor layer 51, the sheet 50 and the second conductor layer 52, and the second conductor layer 52 of the multilayer board 53 is patterned, corresponding to each of pressure chambers 41C of the passage board 41 in the same pattern as that of each upper electrode layer 47 of a piezoelectric actuator 42. |
