LASER STABILIZING METHOD AND DEVICE AND LASER SYSTEM BEING PROVIDED WITH THIS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser stabilizing device for optimizing, controlling and stabilizing laser output beam. SOLUTION: A performance of laser output beam 21 is stabilized by automatically adjusting an angle position and a lateral position of the output beam 21 of laser 10. A component of the output beam 21 is detected at a far-field position along the component beam passage and is detected at a near-field position along the same passage. The performance of the laser output and both the angle and the lateral positions are decided after the detection at both the far and the near field positions. Both the angle and the lateral positions of the output beam are automatically regulated so as to optimize the output beam. The adjustment of both the angle position and the lateral position is possible by preferably using a beam operating device 200 including two mirrors.