发明名称 MANUFACTURING METHOD FOR MAGNETIC HEAD DEVICE, MAGNETIC HEAD DEVICE AND INTERMEDIATE PRODUCT OF MAGNETIC HEAD DEVICE
摘要 PROBLEM TO BE SOLVED: To prevent needless ruggedness from being formed on an ABS plane by etching for processing a slider ABS plane even when a gap layer is constituted of a non-alumina base non-magnetic material being a different kind from a constitution material of a substrate. SOLUTION: Many thin film magnetic head elements 3 consisting of plural constitution layers including magnetic gap layers 8, 11, 13 constituted of a non-magnetic material are formed in a lattice arrangement state on a wafer surface. In such a forming process of the elements 3, a constitution material of the magnetic gear layers 8, 11, 13 existing in a region to which etching for processing a slider shape is performed is previously eliminated. Then, the wafer on which the elements 3 are formed is cut for every head block, and slider shape processing of a plane 20 opposed to a magnetic recording medium constituted of cut planes of the head block is performed by etching.
申请公布号 JP2000113437(A) 申请公布日期 2000.04.21
申请号 JP19980303327 申请日期 1998.10.08
申请人 READ RITE SMI KK 发明人 MATONO NAOTO;SHIROMOTO TATSUYA;MIYAZAKI TOMIHITO
分类号 G11B5/39;G11B5/31;G11B5/60;G11B21/21;(IPC1-7):G11B5/60 主分类号 G11B5/39
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