| 摘要 |
PROBLEM TO BE SOLVED: To effectively and quickly cool a susceptor by installing a gas jetting part jetting cooling gas for cooling the susceptor, in the vicinity of the outer peripheral part of the susceptor. SOLUTION: A discoidal susceptor 11 is retained by the upper end of a susceptor retaining shaft 16 where a thermocouple 15 is inserted in the center. On the back part of the susceptor, a heater 17 which is a heating means for heating a substrate 12 at a specified temperature via the susceptor is installed. The peripheries of the susceptor 11 and the heater 17 are covered with a box- shaped reflector 18 for effectively transferring heat of the heater 17 to the susceptor 11. In the reflector, gas-jetting parts 19 for jetting cooling gas with respect to the susceptor 11 and the heater 17 are installed in both corner parts becoming the upper stream side to the flow direction of material gas. On the wall surface of the lower stream side which faces the gas jetting parts 19, an exhaust vent 20 for discharging the cooling gas after use from the inside of the reflector 18 is installed.
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