摘要 |
PROBLEM TO BE SOLVED: To provide a refrigerator-cooled superconducting magnet device which does not use such a related component that becomes a hindrance when a single- crystal pulling equipment is installed above the magnet device. SOLUTION: A refrigerator-cooled superconducting magnet device is provided with a vacuum vessel 10 which is arranged around a single-crystal growing device and houses superconducting coils 11a and 11b for impressing a magnetic field upon molten silicon, and cryogenic refrigerators 12a and 12b for cooling the coils 11a and 11b. The refrigerators 12a and 12b, current introducing terminals, and evacuating valves are arranged under the vacuum vessel 10. Since the superconducting magnet device is constituted in the above-mentioned way, the device has a simple structure and can generate cusp type magnetic fields that can tolerate thermal stresses. |