FERROELECTRTRIC MATERIAL, ITS PRODUCTION AND FERROELECTRIC MEMORY

摘要

PROBLEM TO BE SOLVED: To produce a ferroelectric material capable of improving fatigue characteristics and easily forming a capacitor electrode when it is used as a capacitor insulating film, and to provide a ferroelectric memory. SOLUTION: This ferroelectric material is obtained by substituting and solid- dissolving Al to the material expressed by the formula, PbxZr(1-y)TiyO3, wherein x and y represent molar ratio and x is 0.9-1.1 and y is 0.3-0.7. The ferroelectric memory has a capacitor insulating film formed with the ferroelectric material having a film the thickness of 50-500 nm.