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发明名称
Silicon carbide fabrication
摘要
申请公布号
SG71834(A1)
申请公布日期
2000.04.18
申请号
SG19980003349
申请日期
1998.08.28
申请人
TOKAI CARBON COMPANY, LTD.
发明人
KUROYANAGI AKIHIRO;YASUNAKA TOMIYA;USHIJIMA YUJI;KANAI KENICHI
分类号
C04B35/565;B28B1/30;C01B31/36;C23C16/32;C23C16/42;H01L21/683;(IPC1-7):C23C16/32
主分类号
C04B35/565
代理机构
代理人
主权项
地址
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