HIGH FLOW METAL MEMBRANE GAS FILTER

摘要

An ultra-high efficiency, highly porous particulate gas filter capable of operating at gas flows from about 300 slpm to about 25,000 slpm is formed of a highly porous, compact filter sintered metal media. The filters according to the present invention exhibit a filtration efficiency substantially in excess of a 6 log reduction (99.9999+) (6LRV) and preferably better than a 9 log reduction (99.9999999+) (9LRV) at the desired gas flow rates with a flow per unit area of from about 1 to about 4 slpm/sq.cm. These filters are compact, providing a unit which is significantly smaller than those conventionally used in the filtration of ultrahigh process gas streams with the same or greater efficiency of filtration and flow/unit area.