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发明名称
Verfahren und Vorrichtung zur Herstellung eines Einkristalles
摘要
申请公布号
DE69606966(D1)
申请公布日期
2000.04.13
申请号
DE1996606966
申请日期
1996.12.23
申请人
SHIN-ETSU HANDOTAI CO., LTD.
发明人
HOSHI, RYOUJI;SONOKAWA, MASASHI;FUSEGAWA, IZUMI;OHTA, TOMOHIKO
分类号
C30B15/00;C30B15/30;C30B29/06;C30B33/04;(IPC1-7):C30B15/30
主分类号
C30B15/00
代理机构
代理人
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地址
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