发明名称 METHOD AND DEVICE FOR DECOMPOSING CIRCUIT MEMBER BY WATER IN SUPERCRITICAL FLUID STATE
摘要 A supercritical fluid is formed by heating a liquid-state water (13) sealed along with a circuit member (30) into an airtight container (2) by an internal heating means (4) to heat the water (13) to not lower than a preset temperature and pressurize it to not lower than a preset pressure. A supercritical fluid, being extremely high in intermolecular collision rate, can deliver a specific dissolution power and activate various reactions favorably to thereby satisfactorily and quickly decompose a circuit member (30) which is difficult to be decomposed by a liquid- or gaseous-state water. In addition, an addition of sulfur (14) to a liquid-state water (13) can recover various metals from a circuit member (30) favorably.
申请公布号 WO0020140(A1) 申请公布日期 2000.04.13
申请号 WO1999JP05404 申请日期 1999.10.01
申请人 ADVANTEST CORPORATION;SUGIMOTO, YOSHIMI;WATANABE, MASAO 发明人 SUGIMOTO, YOSHIMI;WATANABE, MASAO
分类号 B09B3/00;B01D11/02;B08B7/00;B09B5/00;C22B3/00;C22B7/00;(IPC1-7):B09B3/00;C08J11/00 主分类号 B09B3/00
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