发明名称 |
Fresnel zone mask for pupilgram |
摘要 |
A test photomask comprising a fresnel zone target (FZT) pattern may be used to verify the adjustment of a precision projector illumination system of an image projection system. The method comprises the steps of creating the FZT pattern on a photomask, projecting a pupil diagram onto an image plane using the FZT pattern, and evaluating the pupil diagram to determine the illumination system adjustment.
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申请公布号 |
US6048651(A) |
申请公布日期 |
2000.04.11 |
申请号 |
US19980177951 |
申请日期 |
1998.10.23 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BRUNNER, TIMOTHY A.;KIRK, JOSEPH P.;PROGLER, CHRISTOPHER J. |
分类号 |
G03F1/08;G03F1/14;G03F7/20;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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