发明名称 Negative-working photoresist compositions and and use thereof
摘要 PCT No. PCT/JP97/02605 Sec. 371 Date Jan. 29, 1999 Sec. 102(e) Date Jan. 29, 1999 PCT Filed Jul. 28, 1997 PCT Pub. No. WO98/04959 PCT Pub. Date Feb. 5, 1998A negative-working photoresist composition comprising 1,4-dihydropyridine derivative as a photosensitive material and a polyamic acid, a heat-resisting photoresist composition comprising a photosensitive polyamic acid which is excellent in sensitivity and resolution and can be easily developed with an aqueous alkali solution is provided. The negative-working photoresist composition contains a polyamic acid and a 1,4-dihydropyridine derivative represented by following formula (I): wherein Ar represents an aromatic group having a nitro group at the ortho-position; R1 represents an alkylene group having from 1 to 5 carbon atoms; and R2, R3, R4, and R5 each represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms.
申请公布号 US6048663(A) 申请公布日期 2000.04.11
申请号 US19990230583 申请日期 1999.01.29
申请人 NITTO DENKO CORPORATION 发明人 FUJII, HIROFUMI;HAYASHI, SHUNICHI
分类号 G03F7/004;G03F7/038;H01L21/027;(IPC1-7):G03F7/004 主分类号 G03F7/004
代理机构 代理人
主权项
地址
您可能感兴趣的专利