| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device to perform displacement measurements on a highly accurate and precise object effectively. SOLUTION: An object 14 on which displacement measurements are to be performed is provided with a visible pattern 16, and the visible pattern 16 is projected onto a plurality of optical sensors 12 as an image pattern formed of changes in systematic radiant intensity. The optical sensors 12 are formed of a plurality of optical sensors arranged at the same uniform intervals as those of the image pattern, and their output is inputted to a circuit 20. The circuit 20 evaluates their output electric signals to determine the displacement of the object.
|
